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Analysis of adhesion behavior of a silica abrasive grain to silicon oxide film by molecular dynamics simulations
Analysis of adhesion behavior of a silica abrasive grain to silicon oxide film by molecular dynamics simulations
2018
Koichi Masuya
Masashi Obuchi
Satomi Hamada
Masuhiro Mikami
Chikako Takatoh
Keywords:
Materials science
Chemical-mechanical planarization
Abrasive
Molecular dynamics
Composite material
Silicon oxide
Adhesion
Correction
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