Modification of Steel Surfaces Following Plasma and Ion Beam Implantation Investigated by Means of Cems

The method of ion treatment of steel surfaces is well documented [1-5]. It has been ascertained that the practical significance of this topic could pave the way for finding methods permitting the creation of modified surface layers with comparably increased thickness. To this end, we focused our research on methods that make it possible to create modified layers ranging in thickness from one to ten micrometers: high current implantation, plasma immersion implantation and compression plasma flow (CPF) method.