Development of the manufacturing technology of microfluidic systems on glass plates

This article describes the manufacturing technology of microfluidic systems on the surface of glass plates. The process of creating a gas chromatographic column using the proposed technique is considered. In accordance with the proposed technology, liquid etching carries out the formation of channels on the plate, and the sealing occurs due to the formation of siloxane bonds. In addition, the process of modifying the internal surface of the channels is described. It consists in passing saturated vapor of trimethylchlorosilane and then passing nitrogen through a sealed channel. In addition, findings of investigation of made prototypes of microfluidic systems in structure of gas chromatograph and its comparison with traditionally used gas chromatography columns are demonstrated.