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OS0201 Effect of Argon Pressure and Bias Voltage on Properties of Sputtered Niobium Sulfide Films
OS0201 Effect of Argon Pressure and Bias Voltage on Properties of Sputtered Niobium Sulfide Films
2012
Shingo Nakano
Michiaki Ikeda
Iwao Sasaki
Kazunari Matsuzaki
Kenji Matsuda
Keywords:
Biasing
Sulfide
Inorganic chemistry
Argon
Niobium
Materials science
Metallurgy
Correction
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