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Investigation of oxygen precipitation behavior in Cz-silicon wafers by the rapid thermal process
Investigation of oxygen precipitation behavior in Cz-silicon wafers by the rapid thermal process
2017
Hideyuki Okamura
Haruo Sudo
Kozo Nakamura
Susumu Maeda
Koji Sueoka
Keywords:
Thermal
Oxygen
Precipitation
Wafer
Metallurgy
Materials science
Rapid thermal processing
cz silicon
oxygen precipitation
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