Piezoelectric and Dielectric Characteristics of Low Temperature Sintering Pb(Mg 1/2 W 1/2 )O 3 -Pb(Mn 1/3 Nb 2/3 )O 3 -Pb(Zr 1/2 Ti 1/2 )O 3 Ceramics with the Substitution of Pb(Mg 1/2 W 1/2 )O 3

In this study, in order to develop low temperature sintering piezoelectric ceramics for LTCC (low-temperature co-fired ceramic) multilayer piezoelectric actuator, PMW-PMN-PZT ceramics using 0.2 wt% Li 2 CO 3 and 0.25 wt% CaCO 3 as sintering aids were investigated according to the variation of PMW substitution. The composition ceramics could be sintered at 900degC by adding sintering aids. As the amount of PMW substitution increased, the crystalline structure of PMW-PMN-PZT ceramics moved gradually from tetragonal phase to rhombohedral phase, and MPB (morphotrophic phase boundary) region appeared at 2 mol% PMW substitution. At the sintering temperature of 900degC, the density, electromechanical coupling factor (kp), mechanical quality factor (Qm), dielectric constant (epsiv tau ), piezoelectric constant (d 33 ) and Curie temperature (T c ) of 2 mol% PMW substituted PMW-PMN-PZT ceramics showed the optimal values of 7.88 g/cm 3 , 0.58, 1002, 1264, 352 pC/N and 336degC, respectively, for LTCC multilayer piezoelectric actuator application.