Combustion Flask Procedure for the Preparation of Samples of Arsenic Collected on Filter Media

Elemental arsenic, arsine, and other arsenic compounds are used as dopants in the production of semiconductor devices. These materials normally are used in enclosed instruments; however, the possibility of exposure to various forms of arsenic exists for workers who service these instruments and associated equipment. To determine the extent of exposure to arsenic particulates, personal monitoring is carried out by collecting samples on filter media. The recommended analysis procedures involve the wet digestion of the filter membrane using concentrated nitric acid followed by the determination of arsenic with graphite furnace atomic absorption. The acid digestion of the filter membrane is time consuming (3–4 hr), requires relatively large amounts of concentrated reagents, and can lead to low recoveries caused by volatilization if the digestion is not carefully controlled. A combustion technique which is rapid (5 min), uses less reagent, and consistently yields excellent recoveries has been developed. As lit...