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Etching of Various SiO2
Etching of Various SiO2
2005
Masayuki Miyashita
Tatsuhiro Yabune
Hirohisa Kikuyama
Akinobu Teramoto
Jun Takano
Keywords:
Dry etching
Etching (microfabrication)
Reactive-ion etching
Etching
Materials science
Composite material
Optoelectronics
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