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Study on Hydrogen-Based Reactive Ion Etching of Ovonic Threshold Switch (OTS) Materials for Phase Change Memory Devices
Study on Hydrogen-Based Reactive Ion Etching of Ovonic Threshold Switch (OTS) Materials for Phase Change Memory Devices
2021
Doo San Kim
You Jung Gill
Yun Jong Jang
Ye-Eun Kim
Geun Young Yeom
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