Toroidal spectrometer for signal detection in scanning ion/electron microscopes
2009
This article presents a second-order focusing toroidal spectrometer/detection system for scanning ion/electron microscopes. The spectrometer, combined with a prefocusing electrostatic lens, is predicted to have relative energy resolutions of 0.02% and 0.088% for emission angular spreads of ±6° and ±10°, respectively, corresponding to transmittances of around 20% and 34%. Initial experimental backscattered electron (BSE) spectra were recorded with a prototype toroidal spectrometer functioning as an attachment unit inside a conventional scanning electron microscope (SEM). These results were used to quantify SEM BSE material contrast.
Keywords:
- Scanning confocal electron microscopy
- Analytical chemistry
- Optics
- Scanning transmission electron microscopy
- Environmental scanning electron microscope
- Low-voltage electron microscope
- Electron beam-induced deposition
- Electron spectrometer
- Spectrometer
- Chemistry
- Electron microscope
- Conventional transmission electron microscope
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