Niobium oxide thin films formed by plasma immersion oxygen ion implantation

Abstract In analogy to conventional beam-line ion implantation, plasma immersion ion implantation can be combined with a deposition technique to an ion assisted coating process. The structure and composition of a coating and its interface to the substrate can be modified by ion implantation. By means of electron beam evaporation and oxygen plasma immersion ion implantation niobium oxide films were prepared at low substrate temperatures (