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direct bonding process of substrates with thinning of the edges of at least one of the two substrates
direct bonding process of substrates with thinning of the edges of at least one of the two substrates
2015
Frank Fournel
Christophe Morales
Hubert Moriceau
F. Rieutord
Keywords:
Thinning
Materials science
Direct bonding
Composite material
Correction
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