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Deposition of polymer film patterns by ion beams
Deposition of polymer film patterns by ion beams
1986
C. R. Fritzsche
K. Eisele
Keywords:
Ion beam
Ion plating
Microstructure
Thin film
Polymer
Analytical chemistry
Ion beam deposition
Ion
Silicon
Chemistry
Composite material
Etching
Irradiation
Polymer chemistry
Deposition (law)
Correction
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