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Aqueous dispersion slurry for chemical mechanical polishing process
Aqueous dispersion slurry for chemical mechanical polishing process
2000
Hiroyuki Yano
Gaku Minamihaba
Yukiteru Matsui
Katsuya Okumura
Akira Iio
Masayuki Hattori
Keywords:
Composite material
Dispersion (optics)
Chemical-mechanical planarization
Materials science
Slurry
Aqueous solution
aqueous dispersion
Chemical engineering
Correction
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