Research on the design of the ultra-high-precision positioning control error compensation

Active researches on milli-structures and micro-machines have been conducted in advanced countries, and micro-machining technology is one of the core items of the researches. The current technical backgrounds of micro-machining can be divided into semiconductor-based machining, such as lithography and etching, and conventional mechanical machining such as cutting, grinding, and electro-spark machining. The former can be limited due to their materials or thickness, and the latter, while having good productivity, suffer from a less-than superior finishing surface. Therefore, the cutting work could be reasonable in terms of superior productivity and a greater degree of freedom. Conventional ultra-high-precision cutting technology can be used for surface machining, but it has not yet been used to produce ultra-fine components. Therefore, researches on the preparation of ultra-highprecision micro-components in three-dimensional spaces with the milling technique using a single crystal diamond bite are underway. In this study, finite element analysis (FEA) was used to determine the safety and control performance of the micro-stage for the design of an elastic-hinge-type stage using a piezo-electric element.