DESIGNOFANOVEL T-LCLIMMITTANCECONVERSION CIRCUITFOR DYNAMIC AND NON-LINEARLOADS

Inrecent years,theimmittance conversion topology [1]hasbecomeattractive as a novelpower conversion strategy because ofitsfeatures that a constant voltage sourceisconverted toa constant current sourceandvice versa.However, thedesign of an ideal immittance circuit inthehigh-power (-kW) andhigh-frequency (-MHz) rangeispractically very important, especially whenapply toa dynamic and non-linear loadsuchas induction plasma. Inthis article, thedesign anddevelopment ofan ideal TLCLimmittance circuit isreported. Theperformance ofthedesigned immittance circuit isanalysed by using atime-varying inductive plasma load. high-frequency range toprovide higheffective rf power tothedynamic load(plasma). Thebasic design properties oftheimmittance circuit are studied bycircuit analysis andverified theresults by experimental measurementswiththeinductive plasma load atarelatively highrfpower ofabout 510kW.Theperformances oftheimmittance circuit are alsoevaluated andcompared withthatofthe conventional series resonance circuit inhighpressureinduction plasma generation. L L 13 tb O~~~~~~~~~~~I..