Morphology and Electric Property of Aluminium-doped Zinc Oxide Fine Particles Produced by CVD

White colored, tetrapod-shaped and conductive fine particles are synthesized by doping alumimium into zinc oxide using the chemical vapor deposition (CVD) method. Particle morphology changes due to precursors, oxidants and vapor concentration are observed by transmission electron microscopy (TEM) and X-ray diffraction method (XRD). The electric resistivity of the particles is measured by the four-point probe method to examine the electric property of generated particles. Morphology and electric resistivity can be controlled by changing the aluminium vapor concentration and the tetrapod-shaped zinc oxide particles with a low resistivity of about 5Ωm obtained when aluminium acetate is used.