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3ω thermal conductivity measurements of thin film dielectrics on silicon for use in cantilever-based IR imaging
3ω thermal conductivity measurements of thin film dielectrics on silicon for use in cantilever-based IR imaging
2009
Christopher Jones
Flavio Pardo
C.S. Pai
John Eric Bower
J.F. Miner
F. Klemens
Raymond A. Cirelli
E.J. Ferry
Joseph Ashley Taylor
M.R. Baker
B. S. Dennis
W. M. Mansfield
Avinoam Kornblit
R. Keller
J.V. Gates
A.P. Ramirez
Keywords:
Analytical chemistry
Thin film
Silicon nitride
LOCOS
Oxide thin-film transistor
Monocrystalline silicon
Silicon oxide
Nanocrystalline silicon
Silicon
Chemistry
Cantilever
Optics
Optoelectronics
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