Integrated microfluidic probe card, the system and method of use

The present invention provides a biological field effect transistor (BioFET) test apparatus and processing method, system and apparatus. Wafer-level processing means comprises a biosensor wafer stage, integrated microfluidic probe card and a fluid supply and reflux. The integrated microfluidic flow control probe card comprising a base (which may be transparent) at least one microfluidic probe and a plurality of electrical probes are located at the bottom of the base of the flow control, flow control in a microfluidic channel base, top, the fluid flow is located and electronic input port and the output port side portion of the base and a controlled flow control positioned on the base flange of the at least one operation. The method includes aligning a wafer, integrated microfluidic mounting the probe card, so that the flow of the test fluid and test electrical properties. The tool can also be used to identify areas on a fluid apparatus or the mark of the wafer. The present invention also provides an integrated microfluidic probe card, the system and method of use.