Fabrication of Polymeric Micro Structures Using Improved Hot Embossing Technique

The paper proposes an improved hot embossing process of polymeric PMMA material using low-friction silicon molds, forcing and water-cooling subsystems integrated additionally, aiming to reduce total time of embossing cycle and extend lifetime of a master mold. The result of embossing experiments shows that the profile of PMMA micro structures (with a minimum feature size of 2 µm) using improved embossing process is sharper, higher aspect ratio and more uniformed than the counterparts, which use the traditional process without vacuum.