Copper Deposition and Subsequent Grain Structure Evolution in Narrow Lines

Sywert H. Brongersma,Jan D'Haen,Kris Vanstreels,Ward De Ceuninck,Iwan Vervoort,Karen Maex

Copper Deposition and Subsequent Grain Structure Evolution in Narrow Lines

2003

Sywert H. Brongersma
Jan D'Haen
Kris Vanstreels
Ward De Ceuninck
Iwan Vervoort
Karen Maex

IMEC, B-3001 Heverlee, Belgium. IMOMEC, B-3590 Diepenbeek, Belgium. Katholieke Univ Leuven, EE Dept, Louvain, Belgium.Brongersma, SH, IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium.

Keywords:

Grain growth
Copper
Metallurgy
Materials science
Mineralogy
copper deposition
grain structure

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