Thermal imaging of buried heterostructure quantum cascade lasers (QCLs) and QCL arrays using CCD-based thermoreflectance microscopy

Thermal profiles of a single-element quantum cascade laser (QCL) and a five-element QCL array at different bias currents, under quasi-continuous-wave (QCW) conditions, are obtained using the charge-coupled device (CCD)-based thermoreflectance imaging technique. Peak temperature changes of 55 K and 105 K are measured on the single-element QCL (operating at 1.2 A) and the central element of the QCL array (operating at 4.2 A), respectively. The average facet temperature of the single QCL device shows a linear relationship with the dissipated power, indicating an effective thermal resistance of Rth = 3.0 ± 0.2 K/W (7%) for the device. The thermal transient behavior of the single QCL device, in response to a 35 μs-wide heating pulse, is also measured. From the transient curve, an effective thermal time constant of τth = 9.5 ± 0.4 μs (4%) is obtained. Experimental results are compared to the results obtained from heat-transfer models for both the single-element and array devices. Thermal profiles show a thermal...