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Origin of Substrate Heating During Oxide Film Deposition by DC Magnetron Discharge and Superposition of VHF Power
Origin of Substrate Heating During Oxide Film Deposition by DC Magnetron Discharge and Superposition of VHF Power
2015
Kenta Setaka
Takashi Fukui
Kensuke Sasai
Hirotaka Toyoda
Keywords:
Oxide
Substrate (chemistry)
Superposition principle
Cavity magnetron
Analytical chemistry
Materials science
Deposition (law)
Optoelectronics
Correction
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