Two-dimensional MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator

A 2D MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator is studied and proposed. Fe-based metallic glass is an amorphous metal that has excellent mechanical and magnetic properties. In this paper, Fe-based metallic glass is used as magnetic actuation material and torsion bar structure material. The Fe-based metallic glass thin film deposited on a micromirror surface is used as magnetic material that can be magnetically polarized by permanent magnets. Besides, the micromirror consists of two pairs of metallic glass torsion bars to achieve 2D scanning. The excellent mechanical properties of metallic glass were used for increasing the strength and reliability of the micromirror. The fabricated 2D micromirror can be actuated by an electromagnetic solenoid in dual resonant modes. The result shows that the scanning angle of the outer slow axis is 11° at 800 Hz and that of the inner fast axis is 90° at 5249 Hz.