Synthèse du nitrure de bore par faisceau d'ions à partir de borazine

The synthesis of BN at room temperature by ion beam deposition from borazine B 3 N 3 H 6 was studied. The composition of ionized and neutral species emitted from the discharge fed with pure borazine was measured. It can be observed that the major part of the ion beam consists in B 3 N 3 H 5 + ions, whatever the discharge conditions. The N/B ratio in the deposited material is stoichiometric for accelerating voltages less than or equal to 1 kV. The fraction of hydrogen, equal to 19% at 0.5 kV, decreases slowly down to 5% at 1.5 kV. With this hydrogen loss, the layer density decreases, in correlation with the intrinsic stress variations. Nevertheless, the most interesting result can be deduced from the behavior of the deposition yield, which decreases drastically as a function of the accelerating voltage, down to 0 for 1,7-1,8 kV.