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MODULAR PRINCIPLE OF VACUUM SYSTEMS CREATING FOR MICROELECTRONIC TECHNOLOGIES
MODULAR PRINCIPLE OF VACUUM SYSTEMS CREATING FOR MICROELECTRONIC TECHNOLOGIES
2020
M. G. Biryukov
V. V. Odinokov
V. V. Panin
V. M. Dolgopolov
A. V. Shubnikov
Keywords:
Electrical engineering
Microelectronics
Modular design
Engineering
Correction
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