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Design modeling and simulation of electrothermally actuated microgyroscope fabricated using the MetalMUMPs
Design modeling and simulation of electrothermally actuated microgyroscope fabricated using the MetalMUMPs
2009
Shakoor
Bazaz
Hasan
Keywords:
Mechanical engineering
Actuator
Microelectromechanical systems
Proof mass
Microfabrication
Gyroscope
Fabrication
Nickel
Materials science
Finite element method
Correction
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