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Methodology to Analyze Failure Mechanisms on RF-MEMS Switch Using Nano-Indenter
Methodology to Analyze Failure Mechanisms on RF-MEMS Switch Using Nano-Indenter
2010
Dong Seok Kim
Seung Deok Ko
Byung-Kee Lee
Jun-Bo Yoon
Do Kyung Kim
Keywords:
Electronic engineering
Nano-
Microelectromechanical systems
Materials science
Nanotechnology
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