Ultrafast carrier trapping and recombination in highly resistive ion implanted InP

MeV P+ implanted and annealed p-InP, and Fe+ implanted and annealed semi-insulating InP have both been shown to produce the high resistivity, good mobility, and ultrafast optical response desired for ultrafast photodetectors. Hall effect measurements and time resolved photoluminescence were used to analyze the electrical and optical features of such implanted materials. Low temperature annealing was found to yield the fastest response times—130 fs for Fe+ implanted and 400 fs for P+ implanted InP, as well as resistivities of the order ∼106 Ω/square. It was found that the electrical activation of Fe-related centers, useful for achieving high resistivities in Fe+ implanted semi-insulating InP, was not fully realized at the annealing temperatures chosen to produce the fastest optical response. Implanting p-InP in the dose regime where type conversion occurs, and subsequent annealing at 500 °C, produces high resistivities and ultrafast carrier trapping times that are only marginally dose dependent.