Microstrip resonators using two-sided metalorganic chemical vapor deposited Er-Ba-Cu-O thin films

We have measured very low microwave losses in microstrip resonators produced in a newly developed process which deposits high‐temperature Er‐Ba‐Cu‐O superconducting films by metalorganic chemical vapor deposition on both sides of a LaAlO3 substrate. These in situ films have critical temperatures of 92 K. High Tc superconductor (HTS) linear microstrip resonators demonstrated Q’s of 3500 at 10 GHz and 4.2 K, corresponding to surface resistances less than 330 μΩ, which is 45 times better than measured silver resoantors. HTS meanderline resonators with a fundamental frequency of 1.3 GHz have Q’s of 9600 at 4.2 K. Identical silver meanderline circuits have 300 times more surface resistance than HTS circuits.