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Etching process of semiconductor wafers.
Etching process of semiconductor wafers.
1995
Minekazu Sakai
Tsuyoshi Fukada
Nobukazu Ohba
Keywords:
Dry etching
Deep reactive-ion etching
Reactive-ion etching
Etching
Wafer
Semiconductor
Composite material
Materials science
Optoelectronics
Correction
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