Smart Cut™ technology provides excellent layer uniformity for fully depleted CMOS

2013 
Now that silicon product results are becoming available, and that the FD-SOI substrates hit the required uniformity to enable such products. It can now be said that Planar FDSOI is a credible manufacturing technology at 28nm. Furthermore, the technology is in place and has been proven to enable further scaling to at least the 10nm node.
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