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Study on the Plasma-Polymer Thin Films Deposited by Using PECVD and Application Tests for Low-k Insulator
Study on the Plasma-Polymer Thin Films Deposited by Using PECVD and Application Tests for Low-k Insulator
2008
S.-J. Cho
I.-S. Bae
Jin-Hyo Boo
Yong Seob Park
Byungyou Hong
Keywords:
Polymer
Thin film
Physics
Nuclear magnetic resonance
Plasma
Plasma-enhanced chemical vapor deposition
Insulator (electricity)
polymer thin films
Condensed matter physics
Correction
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