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Anisotropic reactive ion etching of aluminium using Cl2, BCl3, and CH4 gases
Anisotropic reactive ion etching of aluminium using Cl2, BCl3, and CH4 gases
1990
J.W. Lutze
A. H. Perero
J. P. Krusius
Keywords:
Polymer
Anisotropy
Reactive-ion etching
Aluminium
Methane
Chemistry
Inorganic chemistry
Chlorine
BCL3
Correction
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