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Dynamic Mode AFM Measurement of CMUT Diaphragm Deflection Profile
Dynamic Mode AFM Measurement of CMUT Diaphragm Deflection Profile
2020
Sazzadur Chowdhury
Keywords:
Diaphragm (structural system)
Deflection (engineering)
Acoustics
Capacitive micromachined ultrasonic transducers
Atomic force microscopy
Materials science
Correction
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