Numerical modeling of a MEMS actuator considering several magnetic force calculation methods

Purpose – The purpose of this paper is to investigate the accuracy of different force calculation methods and their impact on mechanical deformations. For this purpose, a micrometer scaled actuator is considered, which consists of a micro‐coil and of a permanent magnet (PM) embedded in a deformable elastomeric layer.Design/methodology/approach – For the magnetic field evaluation a hybrid numerical approach (finite element method/boundary element method (FEM/BEM) coupling and a FEM/BEM/Biot‐Savart approach) is used, whereas FEM is implemented for the mechanical deformation analysis. Furthermore, for the magneto‐mechanical coupling several force calculation methods, namely the Maxwell stress tensor, the virtual work approach and the equivalent magnetic sources methods, are considered and compared to each other and to laboratory measurements.Findings – The numerically evaluated magnetic forces and the measured ones are in good accordance with each other with respect to the normal force acting on the PM. Neve...