Optical filter responses of InGaAsP microdisk resonators fabricated by polymer wafer bonding

Optical filters based on InGaAsP microdisk resonators with 10 /spl mu/m and 5 /spl mu/m diameters have been fabricated using a polymer wafer bonding process. A narrow linewidth of 0.22 nm and large free spectral range of 38 nm near 1.55 /spl mu/m are obtained. These devices are potentially useful as wavelength add-drop filters in DWDM networks.