A review of the most recent progresses of state-of-art gallium oxide power devices

Until very recently, gallium oxide (Ga 2 O 3 ) has aroused more and more interests in the area of power electronics due to its ultra-wide bandgap of 4.5–4.8 eV, estimated critical field of 8 MV/cm and decent intrinsic electron mobility limit of 250 cm 2 /(V·s), yielding a high Baliga’s figures-of-merit (FOM) of more than 3000, which is several times higher than GaN and SiC. In addition to its excellent material properties, potential low-cost and large size substrate through melt-grown methodology also endows β -Ga 2 O 3 more potential for future low-cost power devices. This article focuses on reviewing the most recent advances of β -Ga 2 O 3 based power devices. It will be starting with a brief introduction to the material properties of β -Ga 2 O 3 and then the growth techniques of its native substrate, followed by the thin film epitaxial growth. The performance of state-of-art β -Ga 2 O 3 devices, including diodes and FETs are fully discussed and compared. Finally, potential solutions to the challenges of β -Ga 2 O 3 are also discussed and explored.