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A process for etching polysilicon with an improved homogeneity and reduced ätzratevariation
A process for etching polysilicon with an improved homogeneity and reduced ätzratevariation
2001
Tuqiang Ni
Kenji Takeshita
Tom Choi
Frank Y. Lin
Wenli Collison
Keywords:
Analytical chemistry
Etching
Homogeneity (statistics)
Materials science
Composite material
Correction
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