Experiment on a Double-Foot Stepping Piezoelectric Linear Motor

A novel double-foot piezoelectric linear motor is proposed. The kinematic model of the motor under stepping motion is presented. The motor mainly consists of a stator with four piezoelectric stacks, a mover, a holding mechanism, and a preloading mechanism to achieve large stroke with high resolution. Finite element simulations are carried out to analyze the motion characteristics of the motor. A prototype is fabricated and a serial experiments are conducted to validate the feasibility of the motor principle. Experimental results indicate that the motor can move at a speed of 670.22 μ m/s with a driving frequency of 120 Hz and a voltage of 120 V. The resolution of the proposed motor is 3.6 μ m while the resolution of the single-step motion is 0.1 μ m.