Non-polar m-plane GaN on patterned Si(112) substrates by metalorganic chemical vapor deposition
2010
The concept of non-polar (11bar00) m-plane GaN on Si substrates has been demonstrated by initiating growth on the
vertical (1bar1bar1) sidewalls of patterned Si(112) substrates using metalorganic chemical vapor deposition. The Si(112)
substrates were wet-etched to expose {111} planes using stripe-patterned SiN x masks oriented along the [1bar10] direction.
Only the vertical Si (1bar1bar1) sidewalls were allowed to participate in GaN growth by masking other Si{111} planes using
SiO2, which led to m-plane GaN films. Growth initiating on the Si (1bar1bar1) planes normal to the surface was allowed to
advance laterally and also vertically towards full coalescence. The full width at half maximum values for the GaN mplane
x-ray diffraction rocking curves were 9 and 27 arcmin when rocked toward the GaN a-axis (parallel to stripes) and
the GaN c-axis (perpendicular to stripes), respectively. Room-temperature photoluminescence showed strong band-edge
emission with an intensity comparable to that of laterally overgrown c-plane GaN. InGaN double heterostructure active
layers grown on these m-GaN templates on Si exhibited two times higher internal quantum efficiencies as compared to
their c-plane counterparts at comparable carrier densities. These results demonstrate a promising method to obtain highquality
non-polar m-GaN films on large area, inexpensive Si substrates.
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