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One‐Micron Polycide (WSi2 on Poly‐Si) MOSFET Technology
One‐Micron Polycide (WSi2 on Poly‐Si) MOSFET Technology
1981
Mon Yen Tsai
H.H. Chao
L. M. Ephrath
Billy Lee Crowder
A. Cramer
R. S. Bennett
C. J. Lucchese
M.R. Wordeman
Keywords:
Micrometre
Inorganic chemistry
Analytical chemistry
MOSFET
Polycide
Chemistry
Optoelectronics
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