AlOx Thin Films Synthesized by Mist Chemical Vapor Deposition, Monitored by a Fast-Scanning Mobility Particle Analyzer, and Applied as a Gate Insulating Layer in the Field-Effect Transistors

We investigated the synthesis of aluminum oxide (AlOx) thin films using mist chemical vapor deposition (mist-CVD) from aluminum acetylacetonate (Al(acac)3) and methanol/water (MeOH/H2O) mixture (vo...