Development of outgassing rate measurement apparatus made of titanium material

In order to measure from the low outgassing of the other of 10{sup -13} Pams{sup -1} to 10{sup -6} Pams{sup -1}, A new measurement method was designed which are composed the two pumping paths, named sample path and blank path, with the conductance modulation mechanisms. In the new outgassing method, the accurate outgassing rate for each path can be estimated by the two measurements of the upstream pressures under the two different conductance orifices, and the sample and blank measurements can be done simultaneously. Installation of the dividing wall is effective in order to prevent inflow to the blank path of the outgass from the sample by the analyzing the rarefied gas dynamics. (author)