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Semiconductor Capacitance-Type Accelerometer with PWM Electrostatic Servo Technique
Semiconductor Capacitance-Type Accelerometer with PWM Electrostatic Servo Technique
1991
Seiko Suzuki
Shigeki Tuchitani
Kazuo Sato
Shotaro Naito
Sadayasu Ueno
Masayosi Suzuki
Norio Ichikawa
Masayuki Sato
Keywords:
Servo
Servo drive
Accelerometer
Pulse-width modulation
Semiconductor
Capacitance
Control engineering
Electronic engineering
Materials science
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