Quasi-linear response of an integrated optical waveguide sensor by a double output readout method

Abstract This paper reports quasi-linear response of the signal with cantilever deflection for an integrated optical waveguide biosensor by a double output readout method. The readout method uses a double output waveguide structure to divide the received light into two power signals, further for achieving the differential signal as the operating signal. With this method, the operation signal has a good monotonicity with cantilever deflection in range of ± 0.4 µm.