Low Energy Methods for the Deposition of BN Thin Films

We report the growth of boron nitride thin films from plasma-assisted dissociation of the precursor molecule boron triazide. Stable films containing mainly sp-bonded BN have been grown for comparison with films grown by other dissociation methods. We conclude that the plasma-assisted dissociation method is superior to previous methods for growing boron nitride thin films from boron triazide.