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Continued scalability of copper/low-k interconnects
Continued scalability of copper/low-k interconnects
2005
Sywert Brongersma
Laure Carbonell
Kris Vanstreels
Francesca Iacopi
Jan D'Haen
Wenqi Zhang
Youssef Travaly
Steven Demuynck
Zsolt Tokei
Ward De Ceuninck
Karen Maex
Keywords:
Parallel computing
Copper
Scalability
Materials science
Computer science
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