Morphology registration analysis-based method for detecting precision of precise main shaft rotation

2011 
The invention provides a morphology registration analysis-based method for detecting precision of precise main shaft rotation. A surface sample is installed on a to-be-detected precise main shaft; a control system controls the to-be-detected precise main shaft to be at a position at an angle theta; surface morphology graphs of the surface sample are collected in order, wherein the surface morphology graphs are obtained when the to-be-detected precise main shaft at complete circumference positions. A morphology data registration analysis processing system analyzes the plurality of surface morphology graphs and error evaluation is simultaneously carried out. According to the invention, a morphology of a surface sample that makes rotation with a precise main shaft is measured and subsequent morphology registration is analyzed and processed; there is no high precision requirement on the surface sample; and an expensive standard external circle profile or a complex testing system and a testing process are not needed. If a two-dimensional morphology/image sensor is selected for utilization, a radial rotation error of the main shaft can be measured; If a three-dimensional morphology measurement sensor is selected for usage, radial and axial rotation errors of the main shaft can be measured simultaneously. The utilization of a measurement sensor with high resolution enables main shaftrotation error detection with nanometer-level precision to be realized.
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