The functionalization of graphene using electron-beam generated plasmas

A plasmas-based, reversible functionalization of graphene is discussed. Using electron-beam produced plasmas, oxygen and fluorine functionalities have been added by changing the processing gas mixtures from Ar/O2 to Ar/SF6, respectively. The reversibility of the functionalization was investigated by annealing the samples. The chemical composition and structural changes were studied by x-ray photoelectron spectroscopy and Raman spectroscopy.